Plasma Analytic Solutions

•  탐침을 이용한 전기신호 분석방식   Electrical diagnostic Tool  
•  실시간 플라즈마 변수 측정   Real time plasma measurement
•  공정가스 플라즈마 측정 (CF4, SF6, BF3, Cl2, BCl3…)   Plasma diagnostics in real processing plasmas
•  Tip depo 상황에도 측정가능
•  측정 변수 : Plasma parameter, Surface related parameter (tip or chamber wall surface)  
•  적용 기술 : Floating Harmonic Method

■  General Langmuir Probe principle

     •  I-V Characteristic Curve
          * Ion, electron densities, electron temperatures from the I-V curve
          * Diagnostics for only non deposition plasma

                        

■  Wise Probe : Floating Harmonic Method

     •  Basic principle
            *  Nonlinearity in plasma-sheath characteristics
            *  Te found using the ratio of ω / 2ω of the probe current by applying  the sinusoidal voltage (ω)
                to the probe though  the blockingcapacitor which holds the DC potential at the floating potential.
                       [Ref]  M. H. Lee, S. H. Jang and C. W. Chung, J. Appl. Phys., 101, 033305 (2007)

       •  Maxwellianelectron distribution & floating condition

                            

■  Comparison with Langmuir probes

       •  Electron Temperatures @ RF Powers  (Argon 20mTorr)

                    

          •  Ion Densities @ RF Powers  (Argon 20mTorr)

                        

  133-791 서울특별시 성동구 행당동 17번지 HIT B107호  피앤에이 솔루션즈   TEL 070-8251-0344

  HIT B107, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, 133-791, KOREA